The electron beam microprobe is used for qualitative and quantitative chemical analysis of solids with a spatial resolution in the range of not less than approx. 5 µm and can detect elements in the atomic number range Z=5-92 in the version available at the Institute of Mineralogy of the University of Innsbruck (W or LaB6 emitter, 5 WDX spectrometers, 1 EDX detector, 1 CL detector) and quantify them depending on the concentration range